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MEMS与智能微系统研究所

王晓毅

供稿: 编辑: 李晓雨 审核: 武楠 发布时间: 2022-03-10 阅读次数:



王晓毅

预聘副教授，博士生导师


办公电话：

电子邮件：xiaoyiwang@bit.edu.cn

办公地点：四号教学楼425(中关村校区)





所在学科

电子科学与技术

集成电路科学与工程

研究方向

1. CMOS-MEMS/MEMS 多维感知智能传感器集成芯片研究，包括电流传感器、磁阻传感器、惯性/振动传感器、气体流量传感器、温湿度传感器、气体传感器、超声波（SAW）传感器、压力传感器及 ASIC 片上接口电路，主要应用于建筑结构安全监测、智能建筑节能减排、呼吸机、质量流量计、呼吸健康监测等应用场合；

2. 柔性传感器研究，包括触觉/压力传感器、超声波（SAW）传感器、折纸微结构等，主要应用于机器人人机交互、机器人感知、电子皮肤、精准理疗器械等应用场合。

招生需求 (博士和博后有推荐去境外交流的机会)：

1. 有意从事微纳加工、传感器研发、微纳系统设计、传感器集成等研究领域的学生（硕士/博士/博后）；

2. CMOS-MEMS传感器件和片上电路的集成芯片的研发，包括利用Global Fundry, TSMC, SMIC 0.18um CMOS工艺设计模拟电路和数字电路 （硕士/博士/博后）;

3. CMOS-MEMS器件的电路设计和信号处理 （硕士/博士/博后）。

个人简历

2022/02-至今，澳门太阳游戏城app，太阳成集团tyc4633，预聘副教授

2020/10-2021/12，香港科技大学，机械与航空航天工程学系，PostDr Fellow

2016/08-2020/08，香港科技大学，机械与航空航天工程学系，博士

代表性论著

期刊论文：

  1. Rui Jiao, Ruoqin Wang, Yixin Wang, Yik Kin Cheung, Xingru Chen, Xiaoyi Wang, Yang Deng & Hongyu Yu，Vertical serpentine interconnect-enabled stretchable and curved electronics，Microsystems and Nanoengineering, 2023.

  2. Wei Xu, Zhijuan Li, Zetao Fang, Bo Wang,Linze Hong, Gai Yang, Su-Ting Han, Xiaojin Zhao*, and Xiaoyi Wang*, A CMOS-MEMS Monolithic Integrated Thermal Flow Sensor System with a Wide Linear Range of -6m/s ~ 6m/s and an SoC Power of<5mW, JSSC,2023.(集成电路领域顶级期刊)

  3. R Zhang, J Qu, Y Cao, X Zhang, Y Jia, X Wang, W Zhou, H Xie, An integrated capacitive sensing method for electrostatic comb-drive micromirrors, Sensors and Actuators A: Physical, 2023.

  4. X. Wang, Y. Deng, P. Jiang, Y.Cheung, Z. Liu, H. Xie, and H. Yu, A Flexible Thin-film Pressure Sensor based on Thermal Conduction Mechanism for Pressure, Orientation, and Mapping Signal Acquisition, IEEE SENSORS Journal, 2022.

  5. Chen, X., Li, Y., Wang, X.* and Yu, H.*, Origami Paper-Based Stretchable Humidity Sensor for Textile-Attachable Wearable Electronics. ACS Applied Materials & Interfaces. (2022) (Co-Corresponding author)

  6. Wang, X., Fang, Z., Song, X. and Xu, W., A nanoscale hot-wire flow sensor based on CMOS-MEMS technology. Frontiers in Mechanical Engineering, p.26. (2022)

  7. X. Wang, Z. Ke, G. Liao, Y. Yang, X. Pan, and W. Xu, Human Respiratory Monitoring Platform with A Fast Response Micro Thermal Flow Sensor, IEEE Sensors Journal. (2022)

  8. X. Wang, Y. Deng, P. Jiang, H.Y. Yu, Low Hysteresis, Pressure-Insensitive, and Transparent Capacitive Strain Sensor for Human Activity Monitoring, Microsystems and Nanoengineering. (2022)

  9. X. Wang, Y.Lee, and W. Xu, Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer with Structure Optimization, Journal of Microelectromechanical Systems. (2022)

  10. X. Wang, Y. Deng, P. Jiang, H.Y. Yu, An Ultrafast-Response and Flexible Humidity Sensor for Human Respiration Monitoring and Non-Contact Safety Warning, Microsystems and Nanoengineering. (2021)

  11. X. Wang, Y. Deng, X.R. Chen, W. Xu, H.Y. Yu, A Vertically Aligned Multi-Wall Carbon Nanotube based Humidity Sensor with Fast Response, Low Hysteresis, and High Repeatability, IEEE Sensors Letters. (2021)

  12. W. Xu, X. Wang*, X. Pan, A. Bermak, YK Lee, Y. Yang, A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge, Transactions on Electron Devices. (2021) (Corresponding author)

  13. Wang X., Lee YK, Xu W. A Reliable Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer with Enhanced Sensitivity and Limit of Detection. Journal of Microelectromechanical Systems. (2021)

  14. Wang, X., Lee YK, Xu W. A Fast Response and CMOS Compatible Micro Gas Flow Sensor with Thermal Feedback. IEEE Sensors Letters. (2020)

  15. X. Wang, Wei Xu, Izhar, and Y. Lee, "Theoretical and Experimental Study and Compensation for Temperature Drifts of Micro Thermal Convective Accelerometer," Journal of Microelectromechanical Systems. (2020)

  16. X. Wang, W. Xu, H. Luo, and Y. Lee, "Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers," Journal of Microelectromechanical Systems. (2019)

  17. W. Xu, X. Wang, Ke, Z. and Lee, Y.K., Bidirectional CMOS-MEMS Airflow Sensor with sub-mW Power Consumption and High Sensitivity. IEEE Transactions on Industrial Electronics. (2021)

  18. W. Xu, X. Wang, X. Zhao, Y., Yang and Y. K. Lee, "Determination of Thermal Conductivities for Thin Film Materials in CMOS MEMS", in IEEE Transactions on Industrial Electronics. (2020)

  19. W. Xu, X. Wang, R. Wang, Izhar, J. Xu and Y. K. Lee, "CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application," in IEEE Transactions on Instrumentation and Measurement. (2020)

  20. W. Xu, X. Wang, X. Zhao, Izhar, and Y. Lee, "Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy," Journal of Microelectromechanical Systems. (2020)

  21. X. Le, X. Wang, Jintao Pang, Y. Liu, B. Fang, Z. Xu, C. Gao, Y. Xu, J. Xie, "A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure," Sensors and Actuators B: Chemical. (2018)

会议论文（遴选）：

  1. Y. Tang, X. Wang, H. Xie，A 2-Axis Si/Al Bimorph-based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing, in 2024 IEEE 36nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, Poster)

  2. H. Yang, Y. Lu, Y. Ding, A. Ren, X. Wang and H, Xie*, “An Electrothermal Microcage based on Al-SiO2 Bimorph Actuators” in 2024 IEEE 37nd International Conference on Micro Electro Mechanical System (MEMS). (顶会, poster)

  3. H. Yang, A. Ren, Y. Ding, Y. Lu, X. Wang and H, Xie*, “A Photosensitive Polyimide (PSPI) - SiO2 Bimorph-Based Electrothermal Micromirror With High Impact Resistance” in 2024 IEEE 37nd International Conference on Micro Electro Mechanical System (MEMS). (顶会, poster)

  4. 王晓毅，谢会开，CMOS-MEMS传感器研究进展，微米纳米学会，微纳器件与系统创新论坛，2023。（邀请报告）

  5. S. Cai, Z. Liu, G. Yang, H. Ding, H.Xie, and X. Wang*, A Smart Real-Time Human Respiration Monitoring System Based on a High-Performance Flow Sensor And Accurate Breathing Rate Recognition Algorithm, in 2023 22th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS), 2023. (顶会, poster)

  6. 王晓毅，单崇书，李紫琳，李雪娇，谢会开, MEMS电流传感器技术及应用现状, 2023半导体材料与电子元器件发展论坛. (邀请报告)

  7. R. Jiao, G. Yang, R. Wang, Y. Tang, Z. Liu, H. Xie, H. Yu *, and X. Wang*, "A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance Enhancement", in 2023 IEEE 36nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, Poster)

  8. Z. Liu, R. Wang, G. Yang, X. Zhang, R. Jiao, X. Li, J. Qi, H. Yu, H. Xie*, and Xiaoyi Wang*, " A Performance Enhanced Thermal Flow Sensor with Novel Dual-Heater Structure Using CMOS Compatible Fabrication Process", in 2023 IEEE 36nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, oral)

  9. 王晓毅，刘钟一，谢会开, "基于薄膜打薄工艺的CMOS-MEMS微热式传感器", in 2022年中国微纳电子技术交流与学术研讨会. (邀请报告)

  10. X. Wang*, Z. Liu, Y.K. Lee, and H. Xie, "A CMOS-MEMS Thermal Convective Accelerometer for Performance Enhancement using Film Thinning Method", in 2022 MicroTAS. (Poster)

  11. X. Wang, X. Chen, Y. Den, H. Yu, "A highly sensitive flexible flow sensor with quadruple heaters and suspended structure for respiration application", in 2022 IEEE 35nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, Poster)

  12. X. Wang, Y. Guo, X. Zhao, W. Xu, " A Bidirectional CMOS MEMS Thermal Wall Shear Stress Sensor with Improved Sensitivity and Low Power Consumption ", in 2021 IEEE 34nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, oral)

  13. Z. Ma, X. Wang*, L. Zhang*, "Vertically Aligned Carbon Nanotubes for Fast Humidity Sensing", The 15th IEEE International Conference on Nano/Micro Engineered & Molecular Systems, 2020 (NEMS). (oral).

  14. X. Wang, W. Xu, G. Lim, Y.K. Lee, "A reliable liquid-based highly sensitive micro thermoresistive convective accelerometer by using 0.35μm cmos mems technology," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 745-748. (顶会, poster)

  15. X. Wang, X. Zhao, H. Luo, W. Xu, Y.K. Lee, "A coriolis force compensated micro thermal convective accelerometer with low crossing effect," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 255-258. (顶会, oral)

  16. W. Xu, X. Wang, X. Zhao, Z. Ke, Y.K. Lee, "an integrated cmos mems gas flow sensor with detection limit towards micrometer per second," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 200-203. (顶会, 优秀学生论文奖获得者)

  17. X. Wang, G. Lim, W. Xu, and Y. Lee, "Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization: Theoretical and Experimental Studies," in 2019 IEEE SENSORS, 2019, pp. 1-4. (poster)

  18. X. Wang, W. Xu, H. Luo, X. Zhao, and Y. Lee, "Theoretical and Experimental Study of z-axis Acceleration Detection of the Micro Thermal Convective Accelerometer," in 2019 IEEE SENSORS, 2019, pp. 1-4. (oral)

  19. X. Wang, W. Xu, Izhar, and Y. Lee, "An Ambient Temperature Compensated Microthermal Convective Accelerometer with High Sensitivity Stability," in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS), 2019, pp. 1827-1830. (顶会, poster)

  20. X. Wang, Li, Jinbeiqi, Ahmed, Moaaz, Bermak Amine, Yi-kuen Lee, "Scaling Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity using a Validated 1-D Model," presented at the The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Grand Hyatt Singapore, Singapore, 22 - 26 April 2018, Singapore, 2018. (oral)

  21. W. Xu, X. Wang, B. Mousa, M. Paszkiewicz, and Y. Lee, "Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology," in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS), 2019, pp. 1913-1916. (顶会, poster)

  22. W. Xu, X. Wang et al., "A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process," in Micro Electro Mechanical Systems (MEMS), 2018 IEEE, 2018, pp. 824-827: IEEE. (顶会，poster)

发明专利：

  1. 许威，王晓毅，赵晓锦，杨亚涛，薄膜热导率的测量装置及测量方法，已授权。（2020100371100）。

  2. 许威，王晓毅，赵晓锦，基于热反馈的微型流量传感器、气流测量系统及测量方法，已授权。（2020101366735）

  3. Y.K. Lee, X. Wang, H. Luo, A Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer, (US Patent, WO2022156819A1, Publication).

  4. X. Wang, Y. Deng, H. Yu, Vertically Aligned Carbon Nanotube Based Strain Sensor, (US Patent, US20230120331A1, Pending).

  5. 王晓毅，李雪娇，杨盖，单崇书，李紫琳，谢会开，一种悬臂梁式霍尔电流传感器及其制作方法，在审。

  6. 王晓毅，刘钟一，谢会开，方东明, 基于剪纸结构的双模柔性量热式流量传感器及其制备方法，在审。

  7. 王晓毅，蔡仕前，谢会开；一种基于气流量传感器的呼吸频率检测方法及其应用，在审；

  8. 王晓毅，丁厚伯，刘钟一，谢会开；一种 CMOS MEMS 集成流量、气体/湿度传感器，在审；

  9. 王晓毅，杨盖，刘钟一，谢会开；一种 CMOS-MEMS 单片集成流量、压力传感器，在审；

  10. 王晓毅，杨盖，刘钟一，谢会开；适用于高湿度环境检测的气体传感器及其制备工艺，在审。

研究成果

目前已发表论文50余篇，以第一作者和通讯作者发表SCI期刊论文14篇，会议论文15篇。

主持课题

1. 单片集成智能传感器融合芯片，国家级青年人才计划，2024.01-2026.12，主持；

2. CMOS-MEMS多传感器集成，国自然青年项目，2024.01-2026.12，主持；

3. 稀土新材料电流传感器，科技部重点研发计划，2024.11-2026.10，子课题，主持；

4. MEMS惯性传感器可靠性研究，XX3基金项目，2024.01-2025.12，主持；

5. 华为人才资助计划，华为技术公司，2023.05-2026.04，主持；

6. 高精度柔性流速传感器，重庆面上，2022.08-2025.07，主持；

7. “CMOS-MEMS-3D集成光学成像系统”, 科技委，2020-2025年，参与。

荣获奖项

  1. 国家级青年人才

  2. IEEE MEMS 2020 国际会议 优秀学生论文奖 （https://mae.hkust.edu.hk/en/news-events/news/detail/2020/20201205-phd-student-xiaoyi-wang-received-outstanding-student-paper-award-award-in-ieee-mems-2020）;

  3. 张瑞浩、曹英超、高鸿鑫、屈家生、范路遥、贾云飞、赵之昊、陈静怡，第十三届“挑战杯”全国大学生创业计划竞赛全国银奖，指导老师（谢会开、王晓毅、周文彪）。

  4. 张瑞浩、曹英超、高鸿鑫、屈家生、范路遥、贾云飞、赵之昊、陈静怡，第十三届“挑战杯”全国大学生创业计划竞赛北京市金奖，指导老师（谢会开、王晓毅、周文彪）。

  5. 张瑞浩、曹英超、高鸿鑫、任秋雨、范路遥、贾云飞、赵之昊、陈静怡、赵晖，第八届“互联网+“全国大学生创新创业大赛北京市银奖，指导老师（谢会开、王晓毅、周文彪）。

  6. 曹雪巍，关翰伦，乐玳杉，吴辰，蔡仕前，刘钟一，张新沅，“青创北京”2023年“挑战杯”首都大学生课外学术科技作品竞赛“青聚奇思”黑科技专项赛二等奖，指导老师（王晓毅、谢会开）

  7. “师缘·北理”庆祝第39个教师节暨教师表彰大会学术创新类表彰，王晓毅。

学术兼职

审稿人: IEEE Sensors Journal, Journal of Microelectromechanical Systems, Sensors and Actuators A, IEEE Transactions on Industrial Electronics, Micromachines， Sensors， Langmuir等.

客座编辑: Micromachines (Development of CMOS-MEMS Sensors and Devices).