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刘霞

供稿: 编辑: 徐浩阳 审核: 武楠 发布时间: 2023-09-06 阅读次数:

 

刘霞

教授，硕导/博导

电子邮件：xia.liu@bit.edu.cn

办公地点：4号教学楼338室






所在学科

电子科学与技术，集成电路科学与工程

研究方向

先进微纳工艺，扫描热探针技术，纳米曲面加工，原子制造，新型信息电子器件，集成电路，低维半导体材料

个人简历

个人简介：

刘霞，太阳成集团tyc4633教授/博导、国家高层次青年人才。本科毕业于合肥工业大学，博士（直博）毕业于清华大学，曾任美国凯斯西储大学副研究员、瑞士洛桑联邦理工学院研究员等。有近7年的海外留学工作经历。长期专注于后摩尔时代的先进微纳工艺、新型纳电子器件和二维集成电路等核心技术研究。出版著作1部，发表第一作者和通讯作者论文30余篇，如Nature Electronics、Nature Communications、Advanced Materials、ACS Nano、Nano Letters、Microsystems & Nanoengineering、Advanced Science、Nano Energy等。主持国家自然科学基金面上项目和国家海外高层次人才青年项目，参与重点研发青年科学家项目。曾作为骨干成员参与欧洲研究委员会（ERC）资助的前沿科技研究项目（约1750万资助）研究，积累了十余年超净间工作经验。担任Transducers 2019、2021会议分会主席和技术委员会委员。担任ACS Nano, Nano Energy, Advanced Functional Materials, Advanced Science, Microsystems & Nanoengineering, ACS Applied Materials & Interfaces等国际知名期刊审稿人。Chip期刊青年编委。

教育背景：

2011.09-2017.06，清华大学，电子科学与技术，工学博士（优秀博士论文一等奖）

2012.09-2013.10，美国加州大学伯克利分校，机械工程，联合培养博士生（国家留学基金委全额资助）

2007.09-2011.06，合肥工业大学，电子科学与技术，工学学士（免试保送清华读博）

教学经历

担任研究生课程《纳米电子器件与应用》（全英文），本科生《纳米电子器件》（全英文）和本科生《电路与模拟电子学》。

代表性论著

Ⅰ. 期刊论文

18.

Xia Liu,* Berke Erbas, Ana Conde-Rubio, Norma Rivano, Zhenyu Wang, Jin Jiang, Siiri Bienz, Naresh Kumar, Thibault Sohier, Marcos Penedo, Mitali Banerjee, Georg Fantner, Renato Zenobi, Nicola Marzari, Andras Kis, Giovanni Boero, Juergen Brugger, Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs. Nature Communications 2024, 15, 6934. https://doi.org/10.1038/s41467-024-51165-4

20. Berke Erbas, Ana Conde-Rubio,* Xia Liu,* Joffrey Pernollet, Zhenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger,* Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification, Microsystems & Nanoengineering 2024, 10, 28.

19. Mohammadreza Rostami, Aleksandra Markovic, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, Xia Liu,* and Juergen Brugger, Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication, Advanced Science 2024, 11, 2303518.

18. Sadegh Kamaei, Xia Liu, Ali Saeidi, Yingfen Wei, Carlotta Gastaldi, Juergen Brugger, Adrian M. Ionescu, Ferroelectric gating of two-dimensionalsemiconductors for the integration of steep-slope logic and neuromorphic devices, Nature Electronics 2023, 6, 658–668. https://doi.org/10.1038/s41928-023-01018-7

17. Wei Xu, Xiuhan Li*, Juergen Brugger, Xia Liu*, Study of the enhanced electricity output of a sliding droplet-based triboelectric nanogenerator for droplet sensor design, Nano Energy 2022, 98, 107166.

16. Ana Conde-Rubio,* Xia Liu, Giovanni Boero, and Jürgen Brugger, Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography, ACS Appl. Mater. Interfaces 2022, 14, 42328−42336.

15. Xia Liu*, Arnob Islam, Ning Yang, Bradley Odhner, Mary Anne Tupta, Jing Guo, Philip X.-L. Feng*, Atomic Layer MoTe2 Field-Effect Transistors and Monolithic Logic Circuits Configured by Scanning Laser Annealing. ACS Nano 2021, 15, 12, 19733–19742.

14. Xia Liu, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, and Juergen Brugger*, Thermomechanical nanocutting of 2D materials. Advanced Materials 2020, 2001232. (EPFL学校官网头条新闻：https://actu.epfl.ch/news/epfl-researchers-cut-atom-sized-patterns-into-2d-m/)

13. Xia Liu, Arnob Islam, Jing Guo, Philip X.-L. Feng*, Controlling polarity of MoTe2 transistors for monolithic complementary logic via Schottky contact engineering. ACS Nano 2020, 14, 2, 1457–1467.

12. Xia Liu, Amit Kumar Sachan, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, Renato Zenobi, Jürgen Brugger*, Thermomechanical Nanostraining of Two-Dimensional Materials. Nano Letters 2020, 20, 11, 8250–8257. (EPFL学校官网头条新闻：https://actu.epfl.ch/news/altering-the-properties-of-2d-materials-at-the-nan/)

11. Xia Liu, Jing Ma, Xiaoming Wu, Liwei Lin, Xiaohong Wang*, Polymeric nanofibers with ultrahigh piezoelectricity via self-orientation of nanocrystals. ACS Nano 2017, 11(2), 1901–1910. (清华大学新闻：https://news.tsinghua.edu.cn/info/1007/54151.htm)

10. Xia Liu, Hui Zhao, Yingxian Lu, Song Li, Liwei Lin, Yanan Du, Xiaohong Wang*, In vitro cardiomyocyte-driven biogenerator based on aligned piezoelectric nanofibers, Nanoscale 2016, 8, 7278–7286.

9. Xia Liu, Si Chen, Juan Pu, Xiaohong Wang*. A Flexible all-solid-state micro supercapacitor and its application in electrostatic energy management system, Journal of Microelectromechanical Systems 2016, 25(5), 929–936.

8. Xia Liu, Maoyun Deng, Xiaohong Wang*. Nanoscale domain imaging and local piezoelectric coefficient d33 studies of single piezoelectric polymeric nanofibers, Materials Letters 2017, 189, 66–69.

7. Xia Liu, Xuanlin Kuang, Sixing Xu, Xiaohong Wang*. High-sensitivity piezoresponse force microscopy studies of single polyvinylidene fluoride nanofibers, Materials Letters 2017, 191:189–192.

6. Xia Liu, Sixing Xu, Xuanlin Kuang, Xiaohong Wang*. Ultra-long MWCNTs highly oriented in electrospun PVDF/MWCNT composite nanofibers with enhanced β phase, RSC Advances 2016, 6, 106690–106696.

5. Xia Liu, Sixing Xu, Xuanlin Kuang, Daxin Tan, Xiaohong Wang*. Nanoscale investigations on β-phase orientation, piezoelectric response, and polarization direction of electrospun PVDF nanofibers, RSC Advances 2016, 6, 109061–109066.

4. Xia Liu, Xiaohong Wang*, Hui Zhao, Yanan Du. Myocardial cell pattern on piezoelectric nanofiber mats for energy harvesting, Journal of Physics Conference Series 2014, 557, 012057.

3. Xia Liu, Xiaohong Wang, Xiaoming Wu, Zhixiong Zhang, Yuanxi Zhang. The synergistic effect of periodic immunomagnetics and microfluidics on universally capturing circulating tumor cells, Microsystem Technologies 2014, 20(7):1337-1344.

2. Xia Liu, Xiaohong Wang*. 3D cardiac cell culture on nanofiber bundle substrates to investigate cell morphology and contraction, Micromachines 2017, 8(5): 147.

1. Kaidi Li, Xia Liu, Yifeng Liu, Xiaohong Wang*. A piezoelectric generator based on PVDF/GO nanofiber membrane, Journal of Physics: Conference Series 2018, 1052, 012110.


Ⅱ. 会议论文

14.

Sadegh Kamaei, Ali Saeidi, Xia Liu, Carlotta Gastaldi, Clara Moldovan, Jürgen Brugger, Adrian M. Ionescu, Fully integrated Si:HfO2 Negative Capacitance 2D-2D WSe2/SnSe2 Subthermionic Tunnel FETs, ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC), 19-22 September 2022, Milan, Italy.

13. Berke Erbas, Ana Conde-Rubio, Xia Liu, Mitali Banerjee, Marcos Penedo, Georg Fantner, Giovanni Boero, Juergen Brugger, Grayscale nanopatterning for 2D material straining, 48th International conference on micro and nanoengineering (MNE 2022), Sept 19-23, 2022. Leuven, Belgium.

12. X Liu, M Rostami, A Conde Rubio, G Boero, J Brugger, Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist, 47th Micro and Nano Engineering Conference (MNE 2021), Sept 20-23, 2021, Turin, Italy.

11. A Conde Rubio, X Liu, G Boero, J Brugger, Edge-contact MoS2 transistors made by thermal scanning probe lithography, 47th Micro and Nano Engineering Conference (MNE 2021), Sept 20-23, 2021, Turin, Italy.

10. Xia Liu, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, Juergen Brugger. Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography, CMD2020GEFES, 2020 joint conference of the condensed matter divisions of EPS_CMD and RSEF-GEFES, Online, 31st August - 4th September, 2020.

9. Xia Liu, Arnob Islam, Philip X.L. Feng*. Few-layer MoTe2 suspended channel transistors and nanoelectromechanical resonators, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019), June 23-27, 2019, Berlin, Germany, page 2408-2411.

8. Xia Liu*, Juergen Brugger, Xiaohong Wang. Self-charging energy harvesting system for wearables, the European Materials Research Society (E-MRS 2019 Spring), May 27-31, 2019, Nice, France.

7. Xia Liu, Xiaohong Wang*, Cardiomyocytes driven piezoelectric nanofiber generator with anisotropic enhancement, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS 2016), January 24-28, 2016, Shanghai, China, page 1189–1192.

6. Xia Liu, Xiaohong Wang*, Song Li, Liwei Lin, Energy harvesting using uniaxially aligned cardiomyocytes, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), January 26-30, 2014, San Francisco, USA, page 159–162.

5. Xia Liu, Xiaohong Wang*, Hui Zhao, Yanan Du, Myocardial cell pattern on piezoelectric nanofiber mats for energy harvesting, 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2014), November 18–21, 2014, Awaji Island, Hyogo, Japan.

4. Hao Jia, Xia Liu, Philip X.-L. Feng*. Manipulating and patterning micro/nanoparticles in liquid using multimode membrane resonators, 2018 IEEE Biomedical Circuits and Systems Conference (BioCAS 2018), Cleveland, USA, page 1–4.

3. Arnob Islam, Xia Liu, Bradley Odhner, Mary Anne Tupta, Philip X.-L. Feng*. Investigation of electrostatic gating in two-dimensional transitional metal dichalcogenide (TMDC) field effect transistors (FETs), 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC 2018), Portland, USA, page 1–4.

2. Sixing Xu, Wei Liu, Xia Liu, Xuanlin Kuang, W. Liu, Xiaohong Wang*. A Mxene based all-solid-state microsupercapacitor with 3D interdigital electrode, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Taiwan, China, page 706–709.

1. Xuanlin Kuang, Xia Liu, Sixing Xu, Xiaohong Wang*. Silicon enclosed in rGO/CNT shell-like scaffold as a micro lithium-ion battery anode, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Taiwan, China, page 714–717.

Ⅲ. 专著

1. 刘霞，心肌细胞驱动的能量收集器及超高压电性纳米纤维研究，清华大学出版社出版。

研究成果

  1. 1. 通过制备纳米灰度结构衬底实现对单层MoS2的应变控制可以显著改善其电学性能。与未应变的MoS2晶体管相比，具有应变的MoS2晶体管的开启电流增加了8倍，室温下迁移率提升至185 cm2/Vs。这一方法为基于应变工程的二维材料物性调控提供了创新的技术路径，具有显著的应用潜力。该研究展示的应变工程方法在提升二维材料晶体管迁移率方面表现出显著效果，为未来高性能二维材料晶体管的设计提供了新的路径。通过可编程的灰度纳米结构控制应变分布，提升了器件电学性能。由于应变能够影响MoS2的光学特性，该技术同样适用于高效光电器件和量子计算器件的制造。

  2. Xia Liu,* et al., Nature Communications 15, 6934 (2024).

  3. Berke Erbas, Ana Conde-Rubio,* Xia Liu,* et al., Microsystems & Nanoengineering (2024)10:28.

  4. Mohammadreza Rostami,…, Xia Liu,* and Juergen Brugger, Advanced Science, 2023, 2303518.

  5. 2. 将扫描热探针技术（t-SPL）与干法刻蚀工艺相结合，制备高分辨率、高纵横比灰度结构的可行性。该研究通过电感耦合等离子体反应刻蚀将t-SPL工艺在PPA层上制造的浅层灰度结构转移到SiO2衬底上，并分别对比了压力、不同气体组分及流速、射频偏置功率等参数对刻蚀选择性的影响，通过优化工艺参数，最终使转移后的灰度结构深度放大了5倍。

  6. Sadegh Kamaei, Xia Liu, et al., Nature Electronics, 2023, 6, 658–668.

  7. Xia Liu, et al., Nano Letters, 2020, 20, 11, 8250–8257.

  8. 3. 研发出了面向<1nm厚度的半导体晶体的纳米加工技术，实现了无侵入式的，无掩模版，无电子束/离子束的直接图形化工艺，最小尺寸可达到20nm。与激光直写技术、电子束/离子束光刻技术相比，此技术对半导体材料性能不产生任何影响，以及避免了使用后续湿法工艺，节省成本和简化工艺。

  9. Xia Liu, et al., Advanced Materials, 2020, 2001232.

  10. Xia Liu,* et al.,ACS Nano, 2021, 15, 12, 19733–19742.

  11. 4. 研究了一种基于热机械原理的纳米探针直写方法来实现二维晶体的局部应变，精度可达到20nm，可调控其禁带宽度（最大可调控0.3eV）。这种可调控的应变可永久保留在二维材料中，从而实现性能可调控的器件。这种直写工艺还可实现大规模加工，从而可直接应用在传感器、电子器件和集成电路的制备。

  12. Xia Liu, et al., Nano Letters, 2020, 20, 11, 8250–8257.

  13. Xia Liu, et al., ACS Nano, 2020, 14, 2, 1457–1467.

  14. 5. 研发了基于非掺杂、非侵入式的方法来调控二维晶体管的p态或n态，利用改变二维晶体与栅极/漏极的肖特基接触势垒来制备p态晶体管和n态晶体管。开发了两种工艺方法，退火和激光直写，实现了采用同种金属电极和同种二维晶体的数字逻辑门电路，为实现大规模的二维集成电路做铺垫。

  15. 6. 实现具有超高压电性的一维柔性纳米纤维。该项研究利用比表面积大的二维材料来调控纳米聚合物纤维的晶相，极大地提升了聚合物的压电性能。该研究方法为未来实现不同材料性能的调控提供了很有前瞻性的借鉴。

  16. Xia Liu, et al., ACS Nano, 2017, 11, 1901−1910.

主持课题

主持国家自然科学基金面上项目，主持国家海外高层次人才青年项目

荣获奖项

2024年，第二届智能材料与光电子器件研讨会，科学创新奖

2024年，澳门太阳游戏城app优秀“三全育人”导师

2021年，国家高层次青年人才

2018年，青年科学家提名奖，全球微系统与纳米工程峰会

2017-2018年，美国凯斯西储大学Wen Ko Fellowship

2017年，清华大学优秀博士学位论文一等奖（系所唯一，37/全校2000+）

2017年，中国通信学会优秀博士学位论文（全国10个名额）

2017年，北京市优秀毕业生

2016年，清华大学综合优秀奖学金 — 蒋震奖学金

2015年，清华大学LAM Research奖学金

2014年，清华大学综合优秀奖学金

2014年，IEEE MEMS 2014优秀论文提名奖

2011年，合肥工业大学优秀毕业生

学术兼职

担任Transducers 2019、2021会议分会主席和技术委员会委员。担任ACS Nano, Nano Energy, Advanced Functional Materials, Advanced Science, Microsystems & Nanoengineering, ACS Applied Materials & Interfaces等国际知名期刊审稿人。Chip期刊青年编委。